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About Lab Lab is an

Found at: first-nemogw.ethz.ch:70/first.txt

# About FIRST-Lab

> FIRST-Lab is an ETH technology platform at the Science City Campus. We
> provide a cleanroom for micro- and nanotechnology to enable young
> scientists performing their research experiments with our
> state-of-the-art equipment. Our services cover high-level
> infrastructure support, training and education of users on the
> equipment, and scientific and technical consulting.

[2017-10-16, http://www.first.ethz.ch/]

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# Available Equipment/Processes

## Epitaxy

- Metal-Organic Vapor Phase Epitaxy (MOVPE)
- Molecular Beam Epitaxy (MBE)

## Characterization

- Optical microscopy
- Scanning Electron Microscopy (SEM)
- Surface Profiling
- Spectroscopic Ellipsometry (SE)
- Optical Reflectometry
- Photoluminescence Mapping (PLM)
- X-ray Diffraction (XRD)
- Electrochemical Capacitance-Voltage Profiling (CV)
- Hall-Effect Measurement
- Electrical Testing (Wafer Probing)
- Stress Measurement
- Langmuir-Blodgett Trough

## Processing

### Deposition

- Electron-Beam Evaporation
- Plasma-Enhanced Chemical Vapor Deposition (PECVD)
- Atomic Layer Deposition (ALD)
- Magnetron Sputtering
- Electroplating of Gold

### Etching

- Wet Etching
- Reactive Ion Etching (RIE)
- Inductively-Coupled Plasma Etching (ICP)

### Micro- and Nanolithography

- Photoresist Spinning including hot plates and dry ovens
- Contact Printing (Mask Aligning)
- Electron-Beam Lithography (EBL)
- Laserwriting (DWL66)
- 500 W Hg UV-Source

## Various

- Micromanipulation
- Bonding
- Annealing
- Wafer Cleaning
- Wafer Cutting
- Lapping/Polishing

[2019-03-07, based on http://www.first.ethz.ch/equipment/first-equipment.html]


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